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The Star of Rare Gases

Xenon (Xe) is one of the rarest of the noble gases, but it has numerous applications that makes it extremely valuable. If you have seen the bright white light beaming from a car, you have experienced xenon at work. The xenon lamps are capable of very high lumens light while being exceedingly energy efficient, as such, it has widespread use in the high-performance lighting industry.

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The Production of Xenon Gas

Air Products has supplied xenon since the 1960s for satellite programs, space travel, propulsion agent for spacecraft and satellite thruster. We also supply to the semiconductor, lighting and medical markets.

Air Products understand purity. Xenon used in semiconductor processes needs to be very pure as any impurities will contaminate the silicon substrate or react with the process chemicals, such as fluorine, to produce poisonous and highly corrosive hydrogen fluoride (HF).

In aerospace, due to the sensitive nature of the electrodes, the xenon needs to be very low in oxygen and water content in order not to burn up the electrode. Air Products ultra-high purity xenon is specially designed for gamma-ray and X-ray spectroscopy detectors used to conduct fundamental research into the universe, and dark matter.  


Semiconductor and Memory Chip Manufacturing
Air Products high-purity xenon is ideal as an atmosphere, plasma and as an ion beam source for etching and deposition.
Aerospace and Ion Engines
High-purity xenon is important to ensure the long lifespan of electrodes.
High-purity xenon is important to ensure superior brightness and long lifespan of the filaments.
Dark Matter Research
Ultra-high-purity Xenon is specially designed for spectroscopy detectors of gamma-ray and X-ray for dark matter.
Anesthesia and CT Scan
Ultra-high purity medical grade xenon is used in anesthesia as it is very safe for the neurological system.

Rare Gases

Rare gases, also known as noble gases, are the most inert and unreactive elements known to man. They are found in very low concentrations in the environment and are manufactured by Air Separation Units (ASU). Due to their unique chemical properties, experts have found very novel and interesting applications for them.

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Xenon for Semiconductor and Memory Chips Manufacturing

Xenon is used for etching and deposition of microchips in semiconductor manufacturing, both as an atmosphere, plasma and as an ion beam source for etching and deposition processes. Xenon used in this process needs to be very pure as any impurities will end up contaminating the silicon substrate or reacting with the process chemicals like fluorine to produce poisonous and highly corrosive hydrogen fluoride (HF). As a global leader in servicing the electronics industry, Air Products’ xenon is produced in our state-of-the-art electronics grade plant for better quality assurance. It can be used in excimer laser, laser buffer gases, etching of DRAM and 3D NAND and plasma display panels.

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大規模な空気分離プラントから超高純度6.0グレードのガスまで、Air Productsはお客様のすべてのニーズを満たす柔軟な供給オプションを提供します。